Recoil implantation of aluminium into n-silicon
- 1 May 1987
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 6 (5) , 531-534
- https://doi.org/10.1007/bf01739275
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Recoil Implantation of Al into Disordered SiliconPhysica Status Solidi (a), 1986
- High-barrier Al/p-Si Schottky diodesIEEE Electron Device Letters, 1985
- New techniques of implantation for near-term applicationsNuclear Instruments and Methods in Physics Research, 1981
- Recrystallization of implanted amorphous silicon layers. I. Electrical properties of silicon implanted with BF+2 or Si++B+Journal of Applied Physics, 1979