A quantitative analysis of single pulse ultraviolet dry laser cleaning
- 15 December 1999
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 86 (12) , 6641-6646
- https://doi.org/10.1063/1.371737
Abstract
Particles as small as 0.3 μm in diameter have been successfully removed from a glasssurface using a single ultraviolet pulse from a frequency doubled copper vapor laser (255.3 nm). Quantitative analysis of the particle density before and after laser irradiation shows that laser cleaning occurs after a fluence threshold is reached. The cleaning efficiency after threshold follows a nonlinear trend with respect to fluence. A model is presented which reveals that the cleaning efficiency is a function of the irradiance distribution of the beam used. Results of modelingthermal expansion of the substrate and particles, and particle adhesion do not confirm a thermal expansion mechanism for laser cleaning in this study, in contrast with other recent reports.This publication has 14 references indexed in Scilit:
- Laser removal of particles from magnetic head slidersJournal of Applied Physics, 1996
- Chemical-free cleaning using excimer lasersPublished by SPIE-Intl Soc Optical Eng ,1996
- CO2 laser-assisted removal of submicron particles from solid surfacesJournal of Applied Physics, 1996
- A practical excimer laser-based cleaning tool for removal of surface contaminantsIEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, 1994
- Shock wave analysis of laser assisted particle removalJournal of Applied Physics, 1993
- Laser cleaning: Laser‐induced removal of particles from surfacesAdvanced Materials for Optics and Electronics, 1993
- Laser-cleaning techniques for removal of surface particulatesJournal of Applied Physics, 1992
- Efficient pulsed laser removal of 0.2 μm sized particles from a solid surfaceApplied Physics Letters, 1991
- Laser-assisted micron scale particle removalApplied Physics Letters, 1991
- Adhesion and Removal of Fine Particles on SurfacesAerosol Science and Technology, 1987