Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactor
- 1 December 1994
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 145 (1-4) , 630-635
- https://doi.org/10.1016/0022-0248(94)91118-5
Abstract
No abstract availableKeywords
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