SOI Technologies: Device Applications and Future Prospects
- 1 January 1984
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Merged CMOS/bipolar technologies utilizing zone-melting-recrystallized SOI filmsIEEE Electron Device Letters, 1984
- Heteroepitaxial silicon characterization: Microstructure as related to UV reflectometryJournal of Crystal Growth, 1983
- High-voltage buried-channel MOS fabricated by oxygen implantation into siliconElectronics Letters, 1981
- Dielectric Isolation: Comprehensive, Current and FutureJournal of the Electrochemical Society, 1977