Heteroepitaxial silicon characterization: Microstructure as related to UV reflectometry
- 1 September 1983
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 63 (1) , 205-208
- https://doi.org/10.1016/0022-0248(83)90449-9
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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