Relationship between the physicochemical and electronic properties of sputtered hydrogenated amorphous silicon films: The effect of substrate temperature
- 1 February 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 124 (3) , 191-197
- https://doi.org/10.1016/0040-6090(85)90265-2
Abstract
No abstract availableKeywords
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