Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 649-657
- https://doi.org/10.1016/0022-3093(83)90257-0
Abstract
No abstract availableThis publication has 49 references indexed in Scilit:
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