Polymer film cutting and ablative etching using a 1-kHz XeCl laser
- 1 December 1985
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 47 (11) , 1229-1231
- https://doi.org/10.1063/1.96337
Abstract
A 1-kHz XeCl laser has been used to investigate cutting and ablative etching of thin polymer films. Significant increases in cutting efficiency and etch rate occur at high pulse rates (≳100 Hz) apparently due to cumulative heating effects. Cut rates of 130 cm s−1 are obtained at 900 Hz for a 12-μm-thick polyethylene teraphthalate film.Keywords
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