Effect of nitrogen gas on preparation of Ti–Al–N thin films by pulsed laser ablation
- 1 May 1998
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 127-129, 994-998
- https://doi.org/10.1016/s0169-4332(97)00780-0
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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