Physico-chemical characterization of thin films obtained by fluorination of GaAs under 5 bar of fluorine
- 15 March 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 170 (2) , 259-271
- https://doi.org/10.1016/0040-6090(89)90732-3
Abstract
No abstract availableKeywords
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