Effect of growth parameters on formation and elimination of vacancy clusters in dislocation-free silicon crystals
- 1 June 1974
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 22 (4) , 311-320
- https://doi.org/10.1016/0022-0248(74)90176-6
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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