Fabrication of distributed electrostatic micro actuator (DEMA)
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 2 (3) , 121-127
- https://doi.org/10.1109/84.260256
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Cryogenic dry etching for high aspect ratio microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Distributed electrostatic micro actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Operation of sub-micron gap electrostatic comb-drive actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Development of an electrostatic actuator exceeding 10 N propulsive forcePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- Deep X-ray and UV lithographies for micromechanicsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Microrobots and micromechanical systemsSensors and Actuators, 1989
- Resist technology for deep‐etch synchrotron radiation lithographyMakromolekulare Chemie. Macromolecular Symposia, 1989
- Adapting available finite element heat transfer programs to solve 2-D and 3-D electrostatic field problemsJournal of Electrostatics, 1987
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987