Layered growth of boron nitride thin films
- 31 August 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 305 (1-2) , 172-184
- https://doi.org/10.1016/s0040-6090(96)09575-2
Abstract
No abstract availableKeywords
This publication has 59 references indexed in Scilit:
- Growth of cubic BN films on β-SiC by ion-assisted pulsed laser depositionApplied Physics Letters, 1995
- Direct observation of hexagonal boron nitride at the grain boundary of cubic boron nitride by high resolution electron microscopyApplied Physics Letters, 1995
- Growth mechanism of cubic boron nitride in a r.f. glow dischargeThin Solid Films, 1995
- Growth and characterization of cubic boron nitride thin filmsJournal of Vacuum Science & Technology A, 1994
- Evidence for rhombohedral boron nitride in cubic boron nitride films grown by ion-assisted depositionPhysical Review B, 1994
- Ion-assisted pulsed laser deposition of cubic boron nitride filmsJournal of Applied Physics, 1994
- Effect of noble gas ions on the synthesis of c-BN by ion beam assisted depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
- Deposition and characterization of boron nitride thin filmsDiamond and Related Materials, 1994
- Compressive stress induced formation of cubic boron nitrideDiamond and Related Materials, 1993
- Growth and characterization of epitaxial cubic boron nitride films on siliconPhysical Review B, 1991