Quantitative evaluation of the perfection of an epitaxial film grown by vapor deposition as determined by thermal energy atom scattering
- 1 May 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 88 (4) , 442-454
- https://doi.org/10.1016/0022-0248(88)90143-1
Abstract
No abstract availableKeywords
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