IR and Raman absorption spectroscopic studies of APCVD, LPCVD and PECVD thin SiN films
- 1 December 2002
- Vol. 69 (1-3) , 301-305
- https://doi.org/10.1016/s0042-207x(02)00349-4
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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