The Effect of Fe Concentration in Substrates on the Characteristics of InP MISFETs
- 1 June 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (6R) , 976-977
- https://doi.org/10.1143/jjap.26.976
Abstract
The relationship between the characteristics of accumulation-type InP MISFETs and the Fe concentrations in their semi-insulating sustrates has been investigated. It was learned that the effective electron mobilities decrease with an increase in the Fe concentration. It was also observed that the threshold voltages shift in the positive direction with an increase in the Fe concentration.Keywords
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