Analysis of failure mechanisms in electrically stressed Au nanowires
- 1 August 1999
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 86 (3) , 1280-1286
- https://doi.org/10.1063/1.370882
Abstract
An analysis of polycrystalline Au thin film interconnects of widths ranging from 850 to 25 nm, and lengths ranging from 1.0 μm to 20 nm which have been electrically stressed to the point of failure is presented. For the longer wires (widths 60–850 nm), the failure current density is typically found to be essentially independent of the wire width, and then rapidly approaching zero for thinner wires. For the wider wires, failure occurs at the end towards the negative electrode; for narrow wires, failure tends to occur towards the center of the wire, as observed using scanning electron microscopy and atomic force microscopy. The mean time to failure for fixed current density is seen to decrease with decreasing wire width. The failure current density for a given wire width increases as the length decreases. An analysis of the temperature profile based on calculations of a simple model is presented which shows that this width-dependent behavior of narrow lines is not anticipated from the assumption of a homogeneous line subject to thermally-assisted electromigration alone.
This publication has 11 references indexed in Scilit:
- Potentiometry and repair of electrically stressed nanowires using atomic force microscopyApplied Physics Letters, 1998
- Electromigration-Induced Breakup of Two-Dimensional VoidsPhysical Review Letters, 1998
- Scanning tunneling potentiometry study of electron reflectivity of a single grain boundary in thin gold filmsJournal of Electronic Materials, 1997
- Characterization of tips for conducting atomic force microscopyReview of Scientific Instruments, 1995
- Electromigration induced transgranular slit failures in near bamboo Al and Al-2% Cu thin-film interconnectsApplied Physics Letters, 1992
- Slit morphology of electromigration induced open circuit failures in fine line conductorsJournal of Applied Physics, 1992
- Electron-phonon interaction and hot electrons in small metal islandsSurface Science, 1990
- Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External SurfacesPhysical Review B, 1970
- ELECTRICAL RESISTIVITY MODEL FOR POLYCRYSTALLINE FILMS: THE CASE OF SPECULAR REFLECTION AT EXTERNAL SURFACESApplied Physics Letters, 1969
- The conductivity of thin metallic films according to the electron theory of metalsMathematical Proceedings of the Cambridge Philosophical Society, 1938