Performance of Fabry–Perot microcavity structures with corrugated diaphragms
- 1 February 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 79 (2) , 162-172
- https://doi.org/10.1016/s0924-4247(99)00267-8
Abstract
No abstract availableKeywords
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