Novel fabrication and characterization method of Fabry–Perot microcavity pressure sensors
- 1 May 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 75 (2) , 168-175
- https://doi.org/10.1016/s0924-4247(98)00352-5
Abstract
No abstract availableKeywords
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