Defect engineering for VLSI epitaxial silicon
- 1 November 1987
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 85 (1-2) , 300-307
- https://doi.org/10.1016/0022-0248(87)90239-9
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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