The interpretation of the spatial resolution of the scanning Auger electron microscope: A theory/experiment comparison
- 1 July 1979
- journal article
- Published by Elsevier in Surface Science
- Vol. 85 (2) , 309-316
- https://doi.org/10.1016/0039-6028(79)90254-1
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- The effect of backscattered electrons on the resolution of scanning Auger microscopySurface Science, 1978
- Monte Carlo calculations of the spatial resolution in a scanning auger electron microscopeSurface Science, 1978
- On the influence of backscattered electrons on the lateral resolution in scanning auger microscopyApplied Physics A, 1977
- Application of Monte Carlo calculation to fundamentals of scanning Auger electron microscopyApplied Physics Letters, 1977
- A digital scanning Auger electron microscope incorporating a concentric hemispherical analyserProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1977
- Comparison of electron sources for high-resolution Auger spectroscopy in an SEMJournal of Applied Physics, 1976
- Scanning auger electron microscopy at 30 nm resolutionPhilosophical Magazine, 1976
- Auger electron spectroscopy at high spatial resolution and nA primary beam currentsJournal of Vacuum Science and Technology, 1975