Study of initial dust formation in an Ar-SiH4 discharge by laser induced particle explosive evaporation
- 1 July 1994
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 76 (1) , 148-153
- https://doi.org/10.1063/1.357120
Abstract
The initial step of particulate growth in a dust forming low pressure radio-frequency discharge has been studied in situ by laser induced particle explosive evaporation (LIPEE). With respect to the conventional light scattering, this method has been found much more efficient to observe small nanometer size particles, especially in the case of UV excimer laser radiation. Experimental results interpreted by a simple model of laser-particle interaction show that the intensity of LIPEE continuum emission depends on the particle radius roughly as r4. This interaction is essentially different from Rayleigh scattering, as the latter varies as r6. A study of time evolution of powder formation by LIPEE emission reveals the initial formation of nanometer size crystallites and the coalescence process leading to larger scale particles. It could be demonstrated that the critical step of dust formation is the initial clustering process leading to nanometer scale crystallites.This publication has 14 references indexed in Scilit:
- Laser diagnostic studies of particulate contamination generated by etching plasmasPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Particulate formation and dusty plasma behaviour in argon-silane RF dischargePlasma Sources Science and Technology, 1993
- Negative hydrogenated silicon ion clusters as particle precursors in RF silane plasma deposition experimentsJournal of Physics D: Applied Physics, 1993
- Measurements of particle size kinetics from nanometer to micrometer scale in a low-pressure argon-silane radio-frequency dischargeApplied Physics Letters, 1992
- Particle generation and behavior in a silane-argon low-pressure discharge under continuous or pulsed radio-frequency excitationJournal of Applied Physics, 1991
- Particulates in aluminum sputtering dischargesJournal of Applied Physics, 1990
- I n s i t u laser diagnostic studies of plasma-generated particulate contaminationJournal of Vacuum Science & Technology A, 1989
- Effects of low-frequency modulation on rf discharge chemical vapor depositionApplied Physics Letters, 1988
- Particle densities in radio-frequency discharges of silaneThe Journal of Physical Chemistry, 1988
- Particle Distributions and Laser-Particle Interactions in an RF Discharge of SilaneIEEE Transactions on Plasma Science, 1986