High Precision Alignment Procedure for an Ellipsometer
- 1 May 1974
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 13 (5) , 1115-1120
- https://doi.org/10.1364/ao.13.001115
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 9 references indexed in Scilit:
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- Measurement and Correction of First-Order Errors in EllipsometryJournal of the Optical Society of America, 1971
- Geometrically Exact Ellipsometer AlignmentApplied Optics, 1971
- Azimuthal Misalignment and Surface Anisotropy as Sources of Error in EllipsometryApplied Optics, 1970
- The effects of polarizer ellipticity on ellipsometry measurementsSurface Science, 1970
- Analyses and Corrections of Instrumental Errors in EllipsometryJournal of the Optical Society of America, 1970
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963