Low energy ion-induced damage of polycrystalline diamond films
- 30 April 1994
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 3 (4-6) , 663-671
- https://doi.org/10.1016/0925-9635(94)90245-3
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Post-depositional diamond etchingDiamond and Related Materials, 1993
- Ion beam modification of diamondDiamond and Related Materials, 1993
- Diamond device delineation via excimer laser patterningDiamond and Related Materials, 1993
- Improvement in IR properties of chemically vapour-deposited diamond films by smoothening with KrF excimer radiationDiamond and Related Materials, 1993
- Epitaxial nucleation of diamond on β-SiC via bias-enhanced microwave plasma chemical vapor depositionDiamond and Related Materials, 1993
- Smoothening of diamond films with an ArF laserDiamond and Related Materials, 1992
- Texture and some properties of vapor-deposited diamond filmsSurface and Coatings Technology, 1989
- Etching of diamond with argon and oxygen ion beamsJournal of Vacuum Science & Technology A, 1984
- Bipolar transistor action in ion implanted diamondApplied Physics Letters, 1982
- On structural transitions in ion-implanted diamondRadiation Effects, 1974