Metallization of glass/ceramic from solutions of organometallic compounds by laser induced pyrolysis
- 1 July 1992
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 7 (7) , 1685-1689
- https://doi.org/10.1557/jmr.1992.1685
Abstract
Direct writing of iron lines on glass and Al2O3 has been achieved by CW CO2 laser-driven pyrolytic dissociation of volatile iron pentacarbonyl liquid. Since a very high organometallic molecular density is realized in the solution, use of a liquid precursor has enabled deposition of micron-thick iron films at the writing speeds of 10–400 mm s−1, which are significantly higher as compared to those achievable by the conventional CVD method. The iron stripes deposited on the glass substrate at the laser power density of 5.3 kW cm−2 and the writing speed of 100 mm s−1 are found to have a resistivity of about 580 μohm-cm. These stripes have been found to have an integral bond with the substrate due to the interface reaction.Keywords
This publication has 15 references indexed in Scilit:
- Laser writing of copper lines from metalorganic filmsApplied Physics Letters, 1987
- Supplemental multilevel interconnects by laser direct writing: Application to GaAs digital integrated circuitsApplied Physics Letters, 1987
- Frequency dependent characteristics in an ion-implanted photo MESFETSolid-State Electronics, 1987
- Laser-initiated deposition reactions: Microchemistry in organogold polymer filmsApplied Physics Letters, 1985
- The M ssbauer spectrum and structure of iron(III) aluminium oxide, FeAIO3Journal of Materials Science Letters, 1984
- Laser chemical vapor deposition of selected area Fe and W filmsJournal of Applied Physics, 1983
- Laser chemical vapor deposition: A technique for selective area depositionJournal of Applied Physics, 1981
- Direct Writing of Refractory Metal Thin Film Structures by Laser PhotodepositionJournal of the Electrochemical Society, 1981
- Spatially delineated growth of metal films via photochemical prenucleationApplied Physics Letters, 1981
- UV photolysis of van der waals molecular filmsChemical Physics Letters, 1981