Sputtering of SiO2 in O2Ar atmospheres
- 1 May 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 139 (2) , 201-208
- https://doi.org/10.1016/0040-6090(86)90338-x
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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