Lattice relaxation of nanostructured semiconductor pillars observed by high-resolution x-ray diffraction
- 27 June 1994
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (26) , 3605-3607
- https://doi.org/10.1063/1.111213
Abstract
High resolution x-ray diffraction is used to obtain two-dimensional reciprocal space maps from two-dimensional periodic arrays of small (<250 nm) semiconductor pillars. The pillars were made by etching an (001) oriented Si wafer that was epitaxially overgrown with Si1−xGex. The pillars were etched to such a depth that they have a Si bottom and a Si1−xGex top. The shape of the pillars and the lattice parameters in the pillars are determined by comparison of the measured maps with kinematical diffraction model calculations using separate Fourier transformation of the shape of the Si and Si1−xGex parts of the grating. It was found that in the pillars the Si1−xGex lattice was totally relaxed, whereas it was compressively strained prior to etching.Keywords
This publication has 10 references indexed in Scilit:
- The three-dimensional resolution function of the four-reflection monochromator: a route to a higher intensityJournal of Applied Crystallography, 1994
- Raman investigations of elastic strain relief in Si1−xGex layers on patterned silicon substrateJournal of Applied Physics, 1993
- Triple crystal x-ray diffractometry of periodic arrays of semiconductor quantum wiresApplied Physics Letters, 1993
- High resolution x-ray diffraction of periodic surface gratingsApplied Physics Letters, 1993
- Determination of strain in epitaxial semiconductor layers by high-resolution X-ray diffractionJournal of Physics D: Applied Physics, 1993
- X-ray diffraction reciprocal space mapping of a GaAs surface gratingApplied Physics Letters, 1993
- Sub-50 nm high aspect-ratio silicon pillars, ridges, and trenches fabricated using ultrahigh resolution electron beam lithography and reactive ion etchingApplied Physics Letters, 1993
- X-Ray Diffraction from Laterally Structured Surfaces: Total External Reflection and Grating Truncation RodsEurophysics Letters, 1992
- Observation and analysis of quantum wire structures by high-resolution X-ray diffractionSurface Science, 1992
- X-ray diffraction from corrugated crystalline surfaces and interfacesApplied Physics Letters, 1990