R.f. plasma deposition from hexamethyldisiloxane-oxygen mixtures
- 1 October 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 250 (1-2) , 206-212
- https://doi.org/10.1016/0040-6090(94)90187-2
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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