Very low power consumption micromachined CO sensors
- 1 May 1999
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 55 (2-3) , 140-146
- https://doi.org/10.1016/s0925-4005(99)00044-1
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Characteristics of silicon-micromachined gas sensors based on Pt/TiOx thin filmsSensors and Actuators B: Chemical, 1997
- Selected-area deposition of multiple active films for conductometric microsensor arraysSensors and Actuators B: Chemical, 1996
- Recent developments in semiconducting thin-film gas sensorsSensors and Actuators B: Chemical, 1995
- WO3 sputtered thin films for NOx monitoringSensors and Actuators B: Chemical, 1995
- Integrated ultra-thin-film gas sensorsSensors and Actuators B: Chemical, 1994
- Rate equation simulation of the height of Schottky barriers at the surface of oxidic semiconductorsSensors and Actuators B: Chemical, 1993
- The Hall effect in polycrystalline and powdered semiconductorsReports on Progress in Physics, 1980
- Interactions of tin oxide surface with O2, H2O AND H2Surface Science, 1979
- The electrical properties of polycrystalline silicon filmsJournal of Applied Physics, 1975