Kinetics of the vapour phase deposition of epitaxial InP
- 1 March 1980
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 9 (2) , 355-370
- https://doi.org/10.1007/bf02670854
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- Vapor Growth of InPJapanese Journal of Applied Physics, 1975
- Mass spectrometric and thermodynamics studies of the CVD of some III–V compoundsJournal of Crystal Growth, 1972
- Kinetics of transport and epitaxial growth of GaAs with a Ga-AsCl3 systemJournal of Crystal Growth, 1971
- Influence of Substrate Temperature on GaAs Epitaxial Deposition RatesJournal of the Electrochemical Society, 1968