Growth of 3CSiC on on-axis Si(100) substrates by chemical vapor deposition
- 2 September 1995
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 154 (3-4) , 303-314
- https://doi.org/10.1016/0022-0248(95)00136-0
Abstract
No abstract availableKeywords
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