Micromachined coplanar waveguides in CMOS technology

This publication has 12 references indexed in Scilit:

• A miniature microwave detector using advanced micromachining
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
• DC - 725 GHz sampling circuits and subpicosecond nonlinear transmission lines using elevated coplanar waveguide
  IEEE Microwave and Guided Wave Letters, 1995
• Large suspended inductors on silicon and their use in a 2- mu m CMOS RF amplifier
  IEEE Electron Device Letters, 1993
• Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies
  IEEE Microwave and Guided Wave Letters, 1993
• High-level CAD melds micromachined devices with foundries
  IEEE Circuits and Devices Magazine, 1992
• A multiline method of network analyzer calibration
  IEEE Transactions on Microwave Theory and Techniques, 1991
• Characteristic impedance determination using propagation constant measurement
  IEEE Microwave and Guided Wave Letters, 1991
• MOSIS - A gateway to silicon
  IEEE Circuits and Devices Magazine, 1988
• Thru-Reflect-Line: An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer
  IEEE Transactions on Microwave Theory and Techniques, 1979
• Measurement of the effective relative permittivity of unshielded coplanar waveguides
  Electronics Letters, 1977