Characterization of silicon ion-implantation damage in single-strained-layer (InGa)As/GaAs quantum wells
- 1 September 1988
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 17 (5) , 405-409
- https://doi.org/10.1007/bf02652126
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Controversy of critical layer thickness for InGaAs/GaAs strained-layer epitaxyApplied Physics Letters, 1988
- Thermal conversion of AlxGa1−xAs layers grown by molecular beam epitaxyApplied Physics Letters, 1987
- Depletion-mode GaAs SISFET's by selective ion implantationIEEE Electron Device Letters, 1987
- High‐fluence ion damage effects in Ar‐implanted (InGa)As/GaAs strained‐layer superlatticesApplied Physics Letters, 1987
- Microwave performance of a quarter-micrometer gate low-noise pseudomorphic InGaAs/AlGaAs modulation-doped field effect transistorIEEE Electron Device Letters, 1986
- Characterization of ion-implantation doping of strained-layer superlattices. I. Structural propertiesJournal of Applied Physics, 1986
- High-frequency noise of In
y
Ga
1−
y
As/Al
x
Ga
1−
x
As MODFETs and comparison to GaAs/Al
x
Ga
1−
x
As MODFETsElectronics Letters, 1986
- X-ray rocking curve study of Si-implanted GaAs, Si, and GeApplied Physics Letters, 1982
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Investigation of Ion Implantation Damage with Stress MeasurementsPublished by Springer Nature ,1971