A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically amplified electron-beam resist material
- 30 June 2008
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry
- Vol. 18 (30) , 3588-3592
- https://doi.org/10.1039/b805394d
Abstract
A novel ladder-type cyclic oligomer (molecular water-wheel = noria) derivative containing t-butyl ester groups was synthesized. This derivative (noria-COOtBu) had good thermal stability, good solubility in common organic solvents, and good film-forming ability. The photo-induced deprotection (UV irradiation for 30 min followed by heating at 130 °C) of films of noria-COOtBu was examined in the presence of a photo-acid generator, and it was found that deprotection of the t-butyl groups proceeded smoothly to give the corresponding carboxylic acid derivative (noria-COOH). Furthermore, when noria-COOtBu(71) (ratio of t-butyl ester groups: 71%) was examined as an electron-beam resist material, a clear line and space pattern was obtained at a resolution of 70 nm.Keywords
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