Low temperature nitridation and hydrogenation of Si films with NH : a photoemission study
- 1 December 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 97-98, 1407-1410
- https://doi.org/10.1016/0022-3093(87)90337-1
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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