Mechanism of graphite baffle gettering in organometallic vapor phase epitaxy; Adsorption of trimethylaluminum on graphite
- 1 March 1983
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 12 (2) , 459-482
- https://doi.org/10.1007/bf02651143
Abstract
No abstract availableKeywords
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