Choice of the molecular weight of an imprint polymer for hot embossing lithography
- 12 January 2005
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 78-79, 625-632
- https://doi.org/10.1016/j.mee.2004.12.079
Abstract
No abstract availableKeywords
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- Nanoimprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996