Abstract
Interface morphology of the molecular beam epitaxial growth of Ge on (100) GaAs and of GaAs on (100) Ge at 400 °C has been studied by reflection high energy electron diffraction. The (100) Ge surface shows a (2×2) reconstruction pattern. A smooth and planar growth of Ge on GaAs is observed; growth of GaAs on Ge, however, shows a rougher surface with a roughness estimated to be several angstroms which is in agreement with our studies on the Ge-GaAs superlattices using other techniques.