A comparison of EDS microanalysis in FIB-prepared and electropolished TEM thin foils

This publication has 16 references indexed in Scilit:

• Preparation of transmission electron microscope specimens from FeAl and WC powders using focused-ion beam milling
  Materials Characterization, 2001
• A review of focused ion beam milling techniques for TEM specimen preparation
  Published by Elsevier ,1999
• Applications of focused ion beam microscopy to materials science specimens
  Micron, 1999
• Applications of focused ion beams in microelectronics production, design and development
  Surface and Interface Analysis, 1995
• Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam
  Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
• Published by Elsevier ,1993
• Tem specimen heating during ion beam thinning: Microstructural instability
  Ultramicroscopy, 1987
• Effects of enhanced diffusion on preferred sputtering of homogeneous alloy surfaces
  Surface Science, 1978
• The quantitative analysis of thin specimens
  Journal of Microscopy, 1975
• Microrelief on ion-bombarded crystals and induced damage
  Radiation Effects, 1970