Fundamentals of ion-beam-assisted deposition: Technique and film properties
- 1 August 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 115, 181-192
- https://doi.org/10.1016/0921-5093(89)90677-1
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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