Interferometric determination of ellipsometric parameters
- 1 September 1978
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 11 (9) , 905-908
- https://doi.org/10.1088/0022-3735/11/9/011
Abstract
The ellipsometric phase shift is measured directly by a double-beam interferometer, which is designed in such a way that it also facilitates the measurement of the polarisation-dependent reflectance and transmittance of the sample. The result is a simple and precise determination of the optical parameters of surfaces and films. The system is inexpensive, easy to operate and applicable to a large variety of samples.Keywords
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