On geometrical dependencies of capacitive coupling voltage contrast
- 31 May 1990
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 12 (1-4) , 341-348
- https://doi.org/10.1016/0167-9317(90)90047-w
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Electron Beam Testing of Submicron StructuresJournal of the Electrochemical Society, 1988
- Design for e-beam testability — A demand for e-beam testing of future device generations ?Microelectronic Engineering, 1987
- Planar and spherical retarding-field spectrometers for electron-beam testing: Evaluation and comparisonMicroelectronic Engineering, 1987
- Some aspects concerning design for e-beam testabilityMicroelectronic Engineering, 1986