Temperature behavior of specific contact resistance and resistivity on nitrogen implanted 6H-SiC with titanium silicide ohmic contacts
- 1 March 1999
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 85 (5) , 2681-2686
- https://doi.org/10.1063/1.369628
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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