Fault Planes in Steam-Oxidized Silicon
- 1 August 1965
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 36 (8) , 2592-2593
- https://doi.org/10.1063/1.1714541
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Growth of Lattice Defects in Silicon during OxidationJournal of Applied Physics, 1964
- Stacking Fault Nucleation in Epitaxial Silicon on Variously Oriented Silicon SubstratesJournal of Applied Physics, 1964
- INTRINSIC-EXTRINSIC STACKING-FAULT PAIRS IN EPITAXIALLY GROWN SILICON LAYERSApplied Physics Letters, 1963
- X-Ray Analysis of Stacking Fault Structures in Epitaxially Grown SiliconJournal of Applied Physics, 1963
- Structure and Origin of Stacking Faults in Epitaxial SiliconJournal of Applied Physics, 1963
- Surface Damage and Copper Precipitation in SiliconPhysica Status Solidi (b), 1963
- Crystallographic Imperfections in Epitaxially Grown SiliconJournal of Applied Physics, 1962
- Electrical and Optical Properties of Heat-Treated SiliconPhysical Review B, 1957