Beam Processing in Silicon Device Technology
- 1 January 1980
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Faltering growth is an important finding in infants and children with congenital heart diseaseEvidence-Based Nursing, 2022
- p-n junction formation by laser annealing of ion-implanted siliconPhysica Status Solidi (a), 1980
- Short Channel MOS FET's Fabricated by Self-Aligned Ion Implantation and Laser AnnealingJapanese Journal of Applied Physics, 1980
- DEFECTS IN LASER-PROCESSED SEMICONDUCTORSPublished by Elsevier ,1980
- Laser annealing of m.o.s.-transistor channel implantationsElectronics Letters, 1979
- Electron-beam annealing of ion-implanted siliconElectronics Letters, 1979