Innovative plasma diagnostics and control of process in reactive low-temperature plasmas
- 1 January 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 98 (1-3) , 1395-1399
- https://doi.org/10.1016/s0257-8972(97)00261-2
Abstract
No abstract availableKeywords
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