Langmuir probe measurements of axial variation of plasma parameters in 27.1 MHz rf oxygen planar discharges
- 1 December 1988
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 8 (4) , 425-444
- https://doi.org/10.1007/bf01016058
Abstract
No abstract availableKeywords
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