Effect of Zr/Ti Ratio on Crystal Structure of Thin Lead Zirconate-Titanate Films Prepared by Reactive Sputtering
- 1 September 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (9S) , 4048-4051
- https://doi.org/10.1143/jjap.32.4048
Abstract
Thin lead zirconate-titanate (PZT) films have been synthesized on MgO(100) using the tripole magnetron sputtering system. This system makes it possible to sputter lead and zirconium-titanium alternately. Lead concentration in the deposited films can be easily adjusted to near stoichiometry through the control of substrate temperature. The c-axis-oriented films with perovskite structure of Morphotropic Phase Boundary composition were obtained at 550°C via the self-limiting process of lead concentration. The formation process of thin PZT films has been investigated with reference to the observed results of the dependence of the crystal structure on Zr/Ti ratio as well as lead concentration in the films.Keywords
This publication has 10 references indexed in Scilit:
- Crystalline Structure of PbTiO3 Thin Films by Multiple Cathode SputteringJapanese Journal of Applied Physics, 1992
- Preparation of PbTiO3 Films Utilizing Self-Control Mechanism of Stoichiometric Composition in Dual-Beam Vacuum Evaporation MethodJapanese Journal of Applied Physics, 1992
- Preparation of PbTiO3 Thin Films by Reactive Ionized Cluster Beam DepositionJapanese Journal of Applied Physics, 1992
- Crystallization of sputtered lead zirconate titanate films by rapid thermal processingJournal of Applied Physics, 1992
- Multi-ion-beam reactive sputter deposition of ferroelectric Pb(Zr,Ti)O3 thin filmsJournal of Applied Physics, 1992
- Observations on the operation of a planar magnetron sputtering system by target erosion patternsThin Solid Films, 1987
- Reaction Sequence in the Formation of Lead Zirconate‐Lead Titanate Solid Solution: Role of Raw MaterialsJournal of the American Ceramic Society, 1983
- Formation of Lead Zirconate‐Lead Titanate Solid SolutionsJournal of the American Ceramic Society, 1965
- Precipitation of Zirconia Phase in Niobium-Modified Ceramics of Lead Zirconate-TitanateJapanese Journal of Applied Physics, 1964
- A Ternary System PbO-TiO2-ZrO2Japanese Journal of Applied Physics, 1962