Fabrication and electrostatic actuation of thin diaphragms
- 1 March 1998
- journal article
- research article
- Published by Springer Nature in KSME International Journal
- Vol. 12 (2) , 161-169
- https://doi.org/10.1007/bf02947160
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- An electrochemical micro actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Strain and strain relief in highly doped siliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Performance of non-planar silicon diaphragms under large deflectionsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- The quantitative determination of the residual stress profile in oxidized p+ silicon filmsSensors and Actuators A: Physical, 1996
- The design, fabrication, and testing of corrugated silicon nitride diaphragmsJournal of Microelectromechanical Systems, 1994
- On-chip decoupling zone for package-stress reductionPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991
- Large deflection performance of surface micromachined corrugated diaphragmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991