High-rate reactive d.c. magnetron sputtering of ZrOx coatings
- 1 December 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 86-87, 381-387
- https://doi.org/10.1016/s0257-8972(96)03038-1
Abstract
No abstract availableKeywords
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